Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing
- Creator: Zhu, Yong , Bazaei, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2011
A micromachined nanopositioner with on-chip electrothermal actuation and sensing
- Creator: Zhu, Y. , Bazaei, A. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010